Study for the nonlinearity and sensitivity of the titanium alloy nano film pressure sensor
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1.The 48th Research Institute, China Electronics Technology Group Corporation, Changsha 410111,China; 2.The High Performance Intelligent Sensor and Testing System in the Key Laboratory of Hunan Province, Changsha 410111, China; 3.The Defense Key Laboratory for Thin Film Sensing Technology in Hunan Province, Changsha 410111,China; 4.School of Materials Science and Engineering, Hunan University, Changsha 410082,China

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TP212;TN405

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    Abstract:

    In order to meet the high-precision measurement requirements of titanium alloy nanofilm pressure sensors, based on the influences of thin film thickness, convex islands, resistance shape and arrangement position to the nonlinearity and sensitivity of sensors, two range pressure sensors are designed and optimized using titanium alloy thin films as sensitive elements. The results indicate that whether there are convex islands or not, the maximum stress of the sensor occurs at the edge of the diaphragm. The maximum stress decreases and the position remains basically unchanged after adding convex islands. Adding convex islands or as the diameter of the convex island increases, the nonlinearity decreases and the sensitivity increases accordingly. To ensure that the sensitivity is not less than 2.5 mV/V in theory, 2 MPa sensor increasing convex islands with Φ2 mm, the nonlinearity decreases to 0.05% and the sensitivity is about 2.67 mV/V. 4 MPa sensor increasing convex islands with Φ3 mm, the nonlinearity decreases to 0.02% and the sensitivity is about 2.89 mV/V. Two ranges of sensors are prepared and tested, the results show that at a range of 2 MPa, the maximum deviations of the sensitivity and nonlinearity between actual values and theoretical values are 0.01 mV/V and 0.01%, respectively. At a range of 4 MPa, the maximum deviations of the sensitivity and nonlinearity between actual values and theoretical values are 0.16 mV/V and 0.02%, respectively. This study provides an important basis for the design of titanium alloy thin film pressure sensors.

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  • Received:
  • Revised:
  • Adopted:
  • Online: October 31,2024
  • Published: