Abstract:Atomic force microscope (AFM) is an important tool for measuring the surface morphology of material objects. In order to realize the high-speed scanning imaging of AFM, an AFM scanning imaging controller based on a Fractional Feedforward-Feedback PID control algorithm is designed. Use fractional-order iterative learning control ( FOILC) in the feedforward loop to learn the error information of the current period in the tracking process to achieve rapid output convergence along the iterative axis; use fractional-order proportional integral (FOPI) control in the feedback loop Increase the accuracy of high-speed imaging. The trajectory tracking simulation and experimental imaging results show that the algorithm can effectively increase the AFM imaging speed and improve the system's nonlinear impact. When the scanning frequency is 25 Hz, the control accuracy reaches 10 -5 . AFM imaging quality has been significantly improved.