微小圆柱零件圆度精密测量及不确定度评价
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1.兰州理工大学机电工程学院兰州730050;2.清华大学深圳国际研究生院深圳518000

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TH16;TN98

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Precision measurement and uncertainty evaluation of roundness of micro-cylindrical parts
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1.School of Mechanical and Electrical Engineering, Lanzhou University of Technology, Lanzhou 730050, China; 2.Tsinghua Shenzhen International Graduate School, Shenzhen 518000, China

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    摘要:

    圆度是评价微小圆柱零件制造精度和互换性的一项重要指标。针对圆度测量过程中零件定位不准导致测量数据存在倾斜误差的问题,提出一种分割-截取圆度测量方法,将零件横截面圆分割为8等分、10等分和12等分,采用轮廓仪对等分后的零件表面进行线性扫描,利用扫描得到的一系列坐标数据表征出各段圆弧轮廓,截取各段圆弧中心部分重构零件横截面圆轮廓,拟合得到被测零件的半径和圆度,实现了微小圆柱零件的高精度圆度测量。以直径为3 mm的滚针为例进行圆度测量实验,不同分割截取情况的测量结果表明,十等分截取75°圆弧拟合得到的滚针半径和圆度分别为1.500 892 9 mm和0.092 μm,偏差均在±0.1 μm内。通过GUM法对影响测量结果的不确定度分量进行分析,计算得到影响圆柱零件半径的综合标准不确定度为0.049 96 μm,表明了所提分割截取圆度测量方法的可靠性和一致性。

    Abstract:

    Roundness is an important index for evaluating the manufacturing accuracy and interchangeability of tiny cylindrical parts. In order to address the inaccurate positioning of the part in the roundness measurement process, which leads to the existence of tilting errors in the measurement data, a segmentation-interception roundness measurement method is proposed, in which the cross-section circle of the part is segmented into eight, ten and twelve equal parts, and the surface of the part is scanned linearly with a profilometer after the equal parts are divided, and a series of coordinate data obtained by scanning is used to characterize the arc contour of each segment, and then the center part of each segment is reconstructed to obtain the radius and roundness of the measured part. The center part of each arc is intercepted to reconstruct the cross-sectional circular profile of the part, and the radius and roundness of the measured part are fitted to realize the high-precision roundness measurement of tiny cylindrical parts. Taking a needle with a diameter of 3 mm as an example for roundness measurement experiments, the measurement results of different segmentation-interception cases show that the radius and roundness of the needle obtained by ten equal interceptions of 75° arc fitting are 1.500 892 9 mm and 0.092 μm, respectively, with a deviation within ±0.1 μm. The uncertainty components affecting the measurement results were analyzed by the GUM method, and the integrated standard uncertainty affecting the radius of cylindrical parts was calculated to be 0.049 96 μm, which demonstrated the reliability and consistency of the proposed splitting-intercepting circularity measurement method.

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赵家黎,赵妍,王紫涵,李飞宇,李桥林,吴丹.微小圆柱零件圆度精密测量及不确定度评价[J].电子测量与仪器学报,2025,39(3):266-274

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  • 在线发布日期: 2025-05-16
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