电子测量与仪器学报

黄强先,秦贤智,张星月,程荣俊,张连生,李红莉,王超群.二维运动台系统辨识与精密驱动控制[J].电子测量与仪器学报,2025,39(11):90-97

二维运动台系统辨识与精密驱动控制

System identification and precise drive control of two-dimensional motion stage

DOI：

英文关键词:2D motion stage drive control system identification linear motor high precision

基金项目:国家重点研发计划（2019YFB2004901）、国家自然科学基金（52305575）、安徽省自然科学基金（2208085ME137）、中央高校基本科研业务费（JZ2024HGTB0196）项目资助

作者	单位
黄强先	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
秦贤智	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
张星月	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
程荣俊	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
张连生	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
李红莉	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009
王超群	1.合肥工业大学仪器科学与光电工程学院合肥230009；2.测量理论与精密仪器安徽省重点实验室合肥230009

Author	Institution
Huang Qiangxian	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Qin Xianzhi	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Zhang Xingyue	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Cheng Rongjun	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Zhang Liansheng	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Li Hongli	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China
Wang Chaoqun	1.School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei 230009, China; 2.Anhui Province Key Laboratory of Measuring Theory and Precision Instrument, Hefei 230009, China

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中文摘要:

为了满足精密测量和精密加工领域对定位系统高定位精度的要求，设计了一种基于系统辨识与精密驱动控制的亚微米精度XY二维运动台系统。该系统包括机械结构和控制系统，其中机械部分采用堆叠结构，X轴运动台位于Y轴运动台之上，其运动由直线电机驱动，光栅传感器进行位置测量。为提高运动台精度和稳定能力，提出了一种基于频域法系统辨识的大行程二维运动台系统控制设计方法，通过在伺服系统中输入正弦激励信号，改变输入信号频率获取频率特性和传递函数，优化了Kvi 积分增益、Kvp-比例增益和Kvfr-前馈增益等控制参数，进而实现了二维运动台的高精度运动。通过一系列验证实验对定位系统的性能进行了评估，二维运动台定位系统行程可达240 mm×240 mm，重复定位精度优于1.5 μm，驱动分辨力可达40 nm。实验结果表明，所开发的亚微米级精度二维运动台系统表现出良好的重复性、稳定性，可应用于精密加工和精密测量等高端装备领域。

英文摘要:

To meet the high positioning accuracy requirements of precision measurement and machining, a novel sub-micrometer precision XY two-dimensional motion stage system based on system identification and precision drive control method was designed. The system consists of a mechanical structure and a control system. The mechanical part adopts a stacked structure, with the X-axis motion stage located above the Y-axis motion stage, driven by a linear motor and positioned by a grating sensor. To improve the accuracy and stability of the motion stage, a control design method based on frequency domain system identification for large-stroke two-dimensional motion stage systems was proposed. By inputting sinusoidal excitation signals into the servo system and changing the input signal frequency to obtain frequency characteristics and transfer functions, the control parameters such as Kvi-integral gain, Kvp-proportional gain and Kvfr-feedforward gain were optimized. Thus, the high-precision motion of the two-dimensional motion stage was realized. A series of verification experiments were conducted to evaluate the performance of the positioning system. The results show that the two-dimensional motion stage positioning system has a travel range of 240 mm×240 mm, a repeat positioning accuracy better than 1.5 μm, and a drive resolution of up to 40 nm. The developed submicron two-dimensional motion stage system shows good repeatability and stability, can be applied to high-end equipment fields such as precision machining and precision measurement.

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