一种高精度便携式扫描隧道显微镜的设计与实现
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1.南京信息工程大学江苏省大气环境与装备技术协同创新中心南京210044; 2.安徽大学信息材料与智能感知安徽省实验室合肥230000

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TH7:TN7

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国家自然科学基金项目(6197122)、信息材料与智能感知安徽省实验室(安徽大学)开放课题(IMIS202402)资助


High-precision portable scanning tunneling microscope: Design and implementation
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1.Jiangsu Collaborative Innovation Center of Atmospheric Environment and Equipment Technology, Nanjing University of Information Science and Technology, Nanjing 210044, China; 2.Information Materials and Intelligent Sensing Laboratory of Anhui Province, Hefei 230000, China

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    摘要:

    扫描隧道显微镜(scanning tunneling microscope, STM)因其卓越的原子级分辨率成像能力,自问世以来在表面科学与纳米技术领域发挥了重要作用。近年来,尽管高端STM在极端条件下取得了诸多科研突破,但高昂的成本与复杂的操作流程限制了其在教学与常规检测中的广泛应用。为解决这一问题,提出一种自主研发的高精度便携式STM系统,具备结构紧凑、成像性能优异、成本低廉等特点。系统由压电扫描头、粗调步进马达、低噪声信号检测电路、STM32H7主控控制系统及基于Qt的上位机软件平台组成。镜体采用模块化设计,内置被动隔振结构,扫描头与马达结构解耦,有效提升了成像稳定性。实验结果表明,控制器输出信号精度高,电压分辨率优于0.6 mV;步进马达运行稳定,空载启动电压为17 V(向下)至24 V(向上),步距范围为0.33 μm(17 V)至2.01 μm(80 V);驱动自研独立扫描头的启动电压为20 V(向下)至29 V(向上),步距为0.21 μm(17 V)至1.26 μm(80 V)。独立扫描头结构紧凑、刚性良好,在1楼地面环境测得室温漂移速率为31.5 pm/min(X-Y方向)和42.3 pm/min(Z方向),在3楼桌面环境分别为34.8和46.2 pm/min,具有良好的结构与电路稳定性。系统在室温大气环境下实现了原子级分辨率成像,具备优异的成像一致性与控制精度,适用于科研实验、教学演示及工业表面检测等多种应用场景。

    Abstract:

    Since its invention, the scanning tunneling microscope (STM) has played a pivotal role in surface science and nanotechnology due to its exceptional atomic-resolution imaging capability. In recent years, although high-end STMs have enabled breakthroughs under extreme conditions, their high cost and operational complexity hinder widespread adoption in education and routine inspection. This paper presents a compact, cost-effective, and high-performance portable STM system developed entirely in-house. The system comprises a piezoelectric scanner, coarse approach stepper motor, low-noise signal detection circuit, STM32H7-based control unit, and a Qt-based user interface, all built from the ground up. A modular microscope body integrates a passive vibration isolation system, and the mechanical decoupling of the scanner and motor enhances imaging stability. Experimental results demonstrate high signal precision, with controller voltage resolution better than 0.6 mV. The stepper motor operates reliably, with a no-load starting voltage of 17 V (down) to 24 V (up) and step sizes ranging from 0.33 μm (17 V) to 2.01 μm (80 V). The custom-developed scanner initiates movement at 20 V (down) to 29 V (up), with step sizes from 0.21 μm (17 V) to 1.26 μm (80 V). The scanner structure is compact and rigid, with measured thermal drift rates of 31.5 pm/min (X-Y) and 42.3 pm/min (Z) on a ground-floor lab, and 44.8 pm/min (X-Y) and 56.2 pm/min (Z) on a third-floor desktop, reflecting excellent structural and electronic stability. Ultimately, the system achieves atomic-resolution imaging under ambient conditions, with high imaging consistency and control precision, making it suitable for scientific research, teaching, and industrial surface characterization.

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谢国康,郭颖,吴哲.一种高精度便携式扫描隧道显微镜的设计与实现[J].电子测量与仪器学报,2026,40(6):222-231

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  • 在线发布日期: 2026-08-12
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