基于光谱共焦原理的五轴数控机床工件在位测量系统
DOI:
CSTR:
作者:
作者单位:

作者简介:

通讯作者:

中图分类号:

TH-39 TH705

基金项目:

工信部高质量发展专项(J0017-2326-QT)、湖北省教育厅科学研究计划项目(Q20233006)资助


A workpiece in-place measurement system for 5-axis CNC machine tools based on spectral confocal principle
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    精密光学元件目前广泛应用于天文观测、空间对地观察、投影光刻物镜等诸多重要的领域,其具有高表面质量、高面形 精度、低表面损伤等特点。 光学元件精加工的最后一道工序一般为抛光,光学元件进行抛光加工时,需要经历“测量-加工”的 反复迭代过程以实现纳米级面型精度和亚纳米级表面粗糙度。 因此,数控抛光加工时在对工件待加工表面面型离线测量后,需 要在机床上对工件进行二次安装及找正,对工件位姿进行精确定位以保证后续的加工精度,而传统的接触式找正或定位方法存 在效率低下、易划伤工件表面等问题。 为此,基于光谱共焦传感器构建了立式五轴机床非接触式在位测量系统,建立了该测量 系统获取工件表面坐标数据的数学模型及光谱共焦传感器在机床上标定的数学模型,利用球面约束方程提出了基于标准球的 补偿标定的方法,并在磁流变抛光机床上开展了实际的标定实验,验证了标定方案的可行性和精确性。 最后进行工件位姿测量 实验,通过雷尼绍三坐标接触式在位测量系统对光谱共焦非接触式在位测量系统的工件位姿测量精度进行了验证。 实验结果 表明本文所提出的光谱共焦非接触式在位测量系统测量标准球的直径误差<6 μm,工件定位误差<10 μm,能够满足磁流变抛光 实际的定位要求。

    Abstract:

    Precision optical components are extensively used in critical fields such as astronomical observation, space exploration, and projection lithography objectives. These components are characterized by high surface quality, precise profile accuracy, and minimal surface damage. Polishing is the final step in the finishing process of optical elements, requiring an iterative “measurement-processing” cycle to achieve nano-level surface accuracy and sub-nano-level surface roughness. After off-line measurement of the surface shape, the workpiece must be re-installed and aligned on the machine tool twice to ensure precise positioning and posture, which is crucial for subsequent processing accuracy. Traditional contact-based alignment and positioning methods suffer from inefficiencies and risks of surface scratches. To address these issues, this paper proposes a non-contact in-place measurement system for vertical five-axis machine tools, utilizing a spectral confocal sensor. A mathematical model is developed for both the measurement system to obtain workpiece surface coordinates and for the calibration of the spectral confocal sensor on the machine tool. Additionally, a compensation calibration method based on a standard ball is introduced, using a spherical constraint equation. The feasibility and accuracy of this calibration method are validated through practical calibration experiments on a magnetorheological polishing machine tool. Finally, a workpiece position and pose measurement experiment is conducted, with the accuracy of the spectral confocal non-contact in-place measurement system verified against a Renishaw three-coordinate in-place measurement system. Experimental results show that the diameter error of the standard ball is less than 6 μm, and the workpiece positioning error is less than 10 μm, meeting the positioning accuracy requirements for magnetorheological polishing.

    参考文献
    相似文献
    引证文献
引用本文

贺帅宇,周 涛,金玲兴,荣佑民,刘秀峰.基于光谱共焦原理的五轴数控机床工件在位测量系统[J].仪器仪表学报,2025,46(1):75-82

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:
  • 最后修改日期:
  • 录用日期:
  • 在线发布日期: 2025-04-08
  • 出版日期:
文章二维码