电子测量与仪器学报

牛国钰,潘巧生,万澳德,陈立蔚.一种利用电涡流效应的微孔直径和深度测量方法[J].电子测量与仪器学报,2023,37(10):123-133

一种利用电涡流效应的微孔直径和深度测量方法

Micro-hole diameter and depth measurement method utilizing eddy current effect

DOI：

英文关键词:microporous measurement eddy current effect coil of measurement

基金项目:国家自然科学基金面上项目(52175533)、安徽省重点研发计划(202104h04020025)项目资助

作者	单位
牛国钰	1. 合肥工业大学仪器科学与光电工程学院，2. 测量理论与精密仪器安徽省重点实验室
潘巧生	1. 合肥工业大学仪器科学与光电工程学院，2. 测量理论与精密仪器安徽省重点实验室
万澳德	1. 合肥工业大学仪器科学与光电工程学院，2. 测量理论与精密仪器安徽省重点实验室
陈立蔚	1. 合肥工业大学仪器科学与光电工程学院，2. 测量理论与精密仪器安徽省重点实验室

Author	Institution
Niu Guoyu	1. School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology,2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument
Pan Qiaosheng	1. School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology,2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument
Wan Aode	1. School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology,2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument
Chen Liwei	1. School of Instrument Science and Optoelectronics Engineering, Hefei University of Technology,2. Anhui Province Key Laboratory of Measuring Theory and Precision Instrument

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中文摘要:

为实现微孔直径和深度非接触式测量,提出一种利用电涡流效应的测量方法,由单层多匝线圈构成的测量线圈在目标体上方匀速经过被测微孔过程中,测量线圈电感值变化的时间与微孔的直径成正比;测量线圈电感峰值与微孔直径的二次方具有线性关系,该线性关系的斜率与微孔的深度成正比。根据等效涡流环模型,建立测量线圈电感值与微孔直径和深度之间的数学模型,利用 COMSOL 有限元仿真,分析测量过程中微孔直径和深度对测量线圈电感值的影响规律,仿真结果与等效涡流环模型分析结果一致。搭建微孔直径和深度的电涡流测量系统,实现直径 1. 5~ 5 mm,深度 0. 1 ~ 0. 5 mm 的微孔测量。当微孔直径大于 3 mm,微孔深度大于 0. 3 mm 时,微孔直径测量相对误差在±2%内。微孔深度的测量分辨率为 0. 01 mm,在微孔直径大于 2. 5 mm 时,微孔深度的测量误差小于 0. 02 mm。

英文摘要:

In order to identify non-contact measurement of micro-hole diameter and depth, this paper proposes a measurement method utilizing eddy current effect. The measuring coil, composed of a single-layer multi-turn coil, traverses evenly over the target body during the micro-hole measurement process. The time variation of the coil’ s inductance correlates directly with the micro-hole’ s diameter. A linear relationship exists between the peak value of the coil’s inductance and the square of the micro-hole’s diameter, where the slope of this linear relationship is proportional to the depth of the micro-hole. According to the equivalent eddy current ring model, a mathematical model was established between the coil’s inductance value and the micro-hole’s diameter and depth. The influence law of the micro-hole diameter and depth on the coil’ s inductance value during the measurement process was analyzed by COMSOL finite element simulation. The simulation results were consistent with the analysis of the equivalent eddy current ring model. The eddy current measurement system for micro-hole diameter and depth was established, achieving measurements for diameters of 1. 5~ 5 mm and depths of 0. 1~ 0. 5 mm. When the micro-hole diameter is larger than 3 mm and depth greater than 0. 3 mm, the relative error in the diameter measurement stays within ±2%. The resolution of the depth measurement is 0. 01 mm. When the diameter of the micro-hole exceeds 2. 5 mm, the measurement error of depth is less than 0. 02 mm.

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