| 李强,刘济春,孔荣宗.耐冲刷薄膜铂电阻热流传感器研制[J].电子测量与仪器学报,2017,31(4):623-629 |
| 耐冲刷薄膜铂电阻热流传感器研制 |
| Development of anti erosion platinum thin film resistance thermal sensor |
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| DOI：10.13382/j.jemi.2017.04.019 |
| 中文关键词: 激波风洞 热流传感器 耐冲刷 多层膜 |
| 英文关键词:shock tunnel thermal sensor anti erosion multi layer film |
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| 摘要点击次数: 2745 |
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| 中文摘要: |
| 薄膜铂电阻热流传感器是激波风洞气动热环境试验的主要测量手段，其缺点是不耐冲刷、易损坏，影响风洞试验效率。为增强铂薄膜热流传感器的耐冲刷能力，以厚度0.06 μm的铬薄膜作为底衬，既能增强铂薄膜在玻璃基体上的附着力，又不会影响铂薄膜的电阻温度系数，并覆盖厚度0.2 μm的二氧化硅薄膜作为保护膜，制作了3层膜结构和两种两层膜结构的热流传感器样品。分析了铬膜及二氧化硅膜对热流传感器电阻温度系数的影响，对3层膜和单层膜热流传感器的一维传热过程进行对比仿真计算，证明二氧化硅膜不会对激波风洞热流测量结果带来明显的影响。通过开展热流传感器的对比验证试验，证明多层膜热流传感器热流测量结果的可靠性，其热流测量精度和耐冲刷能力都得到一定程度提升。 |
| 英文摘要: |
| Traditional Pt thin film resistance thermal sensor is easy to be damaged by erosion, which acts as the main limit to improve the efficiency of heat transfer measurement in shock tunnel. This paper is trying to find a method for developing the anti erosion property of Pt thin film thermal gauge, with 0.06 μm chromium film as the backing film and 0.2 μm silica film as the protective film, samples of three layer and two types of two layer film sensor are made for test. The effect of chromium film and silica film for the resistance temperature coefficient is analyzed, the numerical computations are taken to simulate the heat transfer process of single layer and three layer film model of the thermal sensor. The results show that the silica film has little influence on the heat transfer measurement in shock tunnel. The experiments are specially carried out for comparison and validation, which indicates the reliability of the new sensor measurement result and the progress on durability and accuracy of measurement. |
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