电子测量与仪器学报

黄子军,卞雷祥.压电执行器与应变计复合的电压传感器[J].电子测量与仪器学报,2023,37(2):244-250

压电执行器与应变计复合的电压传感器

Piezoelectric actuator and strain gauge composited voltage sensor

DOI：

英文关键词:high voltage sensor piezoelectric actuator cantilever beam electrical isolation

基金项目:国家自然科学基金(61973165)、安徽省重点研发计划(202104g01020001)项目资助

作者	单位
黄子军	1.南京理工大学机械工程学院
卞雷祥	1.南京理工大学机械工程学院

Author	Institution
Huang Zijun	1.School of Mechanical Engineering, Nanjing University of Science and Technology
Bian Leixiang	1.School of Mechanical Engineering, Nanjing University of Science and Technology

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中文摘要:

将压电陶瓷执行器与悬臂梁式应变传感器通过纵-弯转换机械结构复合,设计了一种“电压-力-应变”转换的新型电压传感器。压电陶瓷执行器与弹性悬臂梁结构“T 形”连接构成纵-弯转换结构,将压电执行器在电压作用下产生的纵向应力/ 应变转换为悬臂梁的弯曲应力/ 应变,实现应力/ 应变的纵向-弯曲转换。布置在弹性悬臂梁结构上下两侧的 4 个电阻应变片组成惠斯通电桥电路,实现对悬臂梁弯曲应力/ 应变的测量。高电压强电侧和力敏感的弱电侧之间的机械转换设计,保证了高度电气隔离。建立了传感器“电压-力-应变”转换物理模型并通过有限元仿真进行了验证。制备了传感器样机,测试结果表明,量程 0~ 5 000 V,灵敏度为 0. 01 μV/ V,非线性误差 1. 83%,分辨率 30 V。

英文摘要:

A voltage-force-strain conversion novel high voltage sensor is designed by combining the piezoelectric ceramic actuator with a cantilever beam strain transducer through a longitudinal-bending conversion mechanical structure. The piezoelectric ceramic actuator is T-connected with the elastic cantilever beam structure to form the longitudinal-bending conversion structure, which converts the longitudinal stress/ strain generated by the piezoelectric actuator under the action of voltage into the bending stress/ strain of the cantilever beam, and the longitudinal-bending conversion of stress/ strain is realized. Four resistive strain gauges are placed on the upper and lower sides of the cantilever beam to form a Wheatstone bridge circuit and the bending stress/ strain of cantilever beam is measured. The mechanical conversion design between the strong electricity side of the high voltage and the weak electricity side of the force sensitive ensures a high degree of electrical isolation. The physical model of voltage-force-strain conversion of the sensor is established and verified by finite element simulation. The prototype device is fabricated, and the test results show that the measurement range of the sensor is 0~ 5 000 V, the sensitivity is 0. 01 μV/ V, the nonlinearity error is 1. 83%, and the resolution is 30 V.

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