| 温银堂,尹申辉,王震宇,张玉燕,宗乐文.阵列式电容传感器优化设计及灵敏特性分析[J].电子测量与仪器学报,2022,36(2):229-234 |
| 阵列式电容传感器优化设计及灵敏特性分析 |
| Optimal design and sensitivity analysis of array capacitance sensor |
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| DOI： |
| 中文关键词: 平面电容传感器 边缘电场 敏感场分布 图像重建 相关系数 |
| 英文关键词:planar capacitive sensor fringe electric field sensitive field distribution image reconstruction correlation coefficient |
| 基金项目:河北省科技计划（216Z1704G, 20312202D)、河北省自然科学基金（F2021203024）项目资助 |
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| Author | Institution |
| Wen Yintang | 1. School of Electrical Engineering, Yanshan University,2. Hebei Province Key Laboratory of Measuring and Testing technologies and Instruments, Yanshan University |
| Yin Shenhui | 1. School of Electrical Engineering, Yanshan University,2. Hebei Province Key Laboratory of Measuring and Testing technologies and Instruments, Yanshan University |
| Wang Zhenyu | 1. School of Electrical Engineering, Yanshan University,2. Hebei Province Key Laboratory of Measuring and Testing technologies and Instruments, Yanshan University |
| Zhang Yuyan | 1. School of Electrical Engineering, Yanshan University,2. Hebei Province Key Laboratory of Measuring and Testing technologies and Instruments, Yanshan University |
| Zong Lewen | 1. School of Electrical Engineering, Yanshan University,2. Hebei Province Key Laboratory of Measuring and Testing technologies and Instruments, Yanshan University |
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| 中文摘要: |
| 平面电容传感器基于边缘效应工作,敏感场具有明显的软场特性,导致其检测能力易受外部因素影响而降低。 为了改
善敏感场分布特性,提升传感器的检测精度,提出了一种新型 12 电极平面阵列电容传感器,对其进行特性分析。 首先,采用数
值模拟方法建立三维敏感场模型,同时选取灵敏度值三维成像的方法分析子灵敏度和整体灵敏度分布特性。 其次,利用评价指
标 P 量化评判新型 12 电极传感器和矩形阵列传感器的敏感场分布均匀性。 建立 3 种不同物场模型并结合 Tikhonov 正则化算
法进行图像重建。 最终结果表明新型传感器的 P 值减小 3. 6%,重建图像的平均相关系数增加 7. 2%。 综合验证了新型 12 电极
传感器有效改善了敏感场均匀性,提升了传感器的检测能力。 |
| 英文摘要: |
| Planar capacitive sensor works based on edge effect. The sensitive field exhibits obvious soft field characteristics, as a result,
its detection ability is easily affected by external factors. In order to ameliorate the sensitive field distribution characteristics and improve
the sensor’ s testing accuracy, this paper proposes a new type of 12-electrode coplanar array capacitive sensor and analyzes its
characteristics. First, a numerical simulation method is used to set a three-dimensional sensitive field model, and the sensitivity value
three-dimensional imaging method is selected to study the sub sensitivity and the overall sensitivity distribution characteristics. Then, the
evaluation index P is used to quantify the uniformity of the sensitive field distribution of the new 12-electrode sensor and the rectangular
array sensor. Three different object model experiments are implemented combined with the Tikhonov regularization algorithm for image
restoration. The final result indicates that the P value of the new sensor is reduced by 3. 6%, and the average correlation coefficient of
the reconstructed image is increased by 7. 2%. It is comprehensively verified that the new 12-electrode coplanar array sensor effectively
improves the uniformity of the sensitive field distribution, enhancing the detection capability of the sensor. |
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