| 李开富,蒋 婷,郭小伟,李绍荣,章龙管,张 兴,牟 松.三质量块 MEMS 三轴电容式加速度计的设计[J].电子测量与仪器学报,2021,35(10):193-201 |
| 三质量块 MEMS 三轴电容式加速度计的设计 |
| Design of three mass block mems triaxial cap-acitive accelerometer |
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| DOI： |
| 中文关键词: 三质量块 三轴电容式加速度计 高机械灵敏度 低交叉灵敏度 SOI |
| 英文关键词:three mass block triaxial capacitive accelerometer high displacement sensitivity low cross sensitivity SOI |
| 基金项目: |
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| 摘要点击次数: 786 |
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| 中文摘要: |
| 为解决电容式加速度计灵敏度低,交叉灵敏度高等性能问题,设计了一种新的三质量块 MEMS 三轴电容式加速度计,
该三质量块加速度计能够测量 X、Y、Z 三个正交轴的外加加速度,单独的横向(X、Y 轴)和垂直轴(Z 轴)加速度计集成在同一
SOI 晶片上,并键合在玻璃基板上,实现了低交叉灵敏度和高机械灵敏度。 分析并建立加速度计结构的数学模型,并通过
COMSOL 仿真分析,优化获得了加速度计的结构和尺寸,设计出的该三质量块加速度计的垂直轴方向的位移灵敏度为
1. 536 69 μm/ g,水平轴方向的位移灵敏度为 6. 78 μm/ g,交叉灵敏度均小于 1%。 |
| 英文摘要: |
| To solve the capacitive accelerometer sensitivity low, cross sensitivity higher performance problems, we design a new quality of
three pieces of three axis MEMS capacitive accelerometer, the quality of three piece of accelerometer to measure the X, Y, Z three
orthogonal axes and acceleration, separate horizontal (X, Y axis) and vertical axis (Z axis) accelerometer integrated on the same SOI
wafer, Low cross sensitivity and high displacement sensitivity are achieved by parallel bonding on the glass substrate. The mathematical
model of the accelerometer structure was analyzed and established, and the structure and size of the accelerometer were optimized through
COMSOL simulation analysis. The displacement sensitivity of the three mass blocks accelerometer in the vertical axis direction was
1. 536 69 μm/ g, and the displacement sensitivity in the horizontal axis was 6. 78 μm/ g, and the cross sensitivity was all less than 1%. |
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