电子测量与仪器学报

赵田锋,许红梅,李岩,陈诚.原子力显微镜的分数阶 PID 控制设计[J].电子测量与仪器学报,2021,35(5):91-99

原子力显微镜的分数阶 PID 控制设计

Design of fractional PID control for atomic force microscope

DOI：

英文关键词:atomic force microscope fractional order control fractional-order iterative learning high-speed scanning imaging

基金项目:科技部国家重点研发计划项目（2017YFE0112100)、吉林省国际合作项目（20180414002GH）资助

作者	单位
赵田锋	1.长春理工大学电子信息工程学院
许红梅	1.长春理工大学电子信息工程学院
李岩	1.长春理工大学电子信息工程学院
陈诚	1.长春理工大学电子信息工程学院

Author	Institution
Zhao Tianfeng	1.School of Electronics and Information Engineering, Changchun University of Science and Technology
Xu Hongmei	1.School of Electronics and Information Engineering, Changchun University of Science and Technology
Li Yan	1.School of Electronics and Information Engineering, Changchun University of Science and Technology
Chen Cheng	1.School of Electronics and Information Engineering, Changchun University of Science and Technology

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中文摘要:

原子力显微镜(AFM)是测量材料物体表面形貌的重要工具。为了实现 AFM 的高速扫描成像,设计一种基于分数阶的前馈-反馈 PID 控制算法的 AFM 扫描成像控制器。将分数阶迭代学习控制(FOILC)用于前馈回路,在跟踪过程中对当前周期的误差信息进行学习,实现输出沿迭代轴的快速收敛;在反馈回路中采用分数阶比例积分(FOPI)控制增加高速成像时的精度。轨迹跟踪仿真和实验成像结果表明,该算法能有效提高 AFM 成像速度和改善系统非线性的影响,在扫描频率为 25 Hz 时,控制精度达到 10 -5 量级,AFM 成像质量得到显著提高。

英文摘要:

Atomic force microscope (AFM) is an important tool for measuring the surface morphology of material objects. In order to realize the high-speed scanning imaging of AFM, an AFM scanning imaging controller based on a Fractional Feedforward-Feedback PID control algorithm is designed. Use fractional-order iterative learning control ( FOILC) in the feedforward loop to learn the error information of the current period in the tracking process to achieve rapid output convergence along the iterative axis; use fractional-order proportional integral (FOPI) control in the feedback loop Increase the accuracy of high-speed imaging. The trajectory tracking simulation and experimental imaging results show that the algorithm can effectively increase the AFM imaging speed and improve the system's nonlinear impact. When the scanning frequency is 25 Hz, the control accuracy reaches 10 -5 . AFM imaging quality has been significantly improved.

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