| 高 洁,张东亮,鹿利单,任光辉.基于跑道型微环谐振腔的 Fano 共振器件设计及
传感特性研究[J].电子测量与仪器学报,2021,35(5):24-30 |
| 基于跑道型微环谐振腔的 Fano 共振器件设计及
传感特性研究 |
| Fano resonator design and sensing characteristics researchbased on racetrack micro-ring resonator |
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| DOI： |
| 中文关键词: Fano 共振 跑道结构 洛伦兹线形 折射率灵敏度 |
| 英文关键词:Fano resonance racetrack structure Lorentzian line shape refractive index sensitivity |
| 基金项目:国家自然科学基金（61735002）项目资助 |
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| Author | Institution |
| Gao Jie | 1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science & Technology University, 2. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University |
| Zhang Dongliang | 1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science & Technology University, 2. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University |
| Lu Lidan | 1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science & Technology University, 2. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University |
| Ren Guanghui | 1. Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument,Beijing Information Science & Technology University, 2. Beijing Laboratory of Optical Fiber Sensing and System, Beijing Information Science & Technology University |
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| 中文摘要: |
| 与传统洛伦兹线形相比,具有不对称线形的 Fano 共振光谱有更高的光谱分辨率,尤其适合传感应用。 通过在硅基总线
波导与跑道微环谐振腔耦合区域引入两个空气孔使得连续光谱产生突变相移,并与跑道微环谐振腔耦合形成 Fano 共振,且在
较宽谱段范围内的每个共振峰都表现为非对称线形。 通过仿真优化耦合间距以及空气孔与耦合区域中心的偏移量,获得最大
光谱分辨率为 312. 05 dB/ nm, 消光比为 53. 09 dB 的硅基 Fano 共振器件。 在模仿被液体的折射率变化范围为 1. 33 ~ 1. 332 的
条件下,仿真得到折射率传感灵敏度为 125 nm/ RIU。 仿真结果表明本论文提出的器件结构简单,尺寸紧凑且制造误差小,为硅
光子器件应用到高灵度敏度的集成生化传感提供新思路。 |
| 英文摘要: |
| Compared with the traditional Lorentz line shape, the Fano resonance spectrum with asymmetric line shape has higher spectral
resolution and is especially suitable for sensing applications. In this paper, two air holes are introduced in the coupling region of the
silicon-based bus waveguide and the runway micro-ring cavity to make the continuous spectrum produce abrupt phase shift, and coupled
with the runway micro-ring resonator to form Fano resonance, and in each of the wider spectrum range. All resonance peaks appear as
asymmetrical lines. By optimizing the coupling distance and the offset between the air hole and the center of the coupling region through
simulation, a silicon-based Fano resonant device with a maximum spectral resolution of 312. 05 dB/ nm and an extinction ratio of
53. 09 dB is obtained. Under the condition that the refractive index change range of the simulated liquid is 1. 33~ 1. 332, the simulation
shows that the refractive index sensing sensitivity is 125 nm/ RIU. The simulation results show that the device proposed in this paper has
simple structure, compact size and small manufacturing error, which provides a new idea for the application of silicon photonic devices to
highly sensitive integrated biochemical sensors. |
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