电子测量与仪器学报

黄子军,卞雷祥,李辉,彭伟民,张闯,文玉梅,李平.高 Q 值超低功耗谐振式磁传感器的设计与实现[J].电子测量与仪器学报,2021,35(5):1-7

高 Q 值超低功耗谐振式磁传感器的设计与实现

Design and fabrication of a resonant magnetic field sensor with highquality factor and low power consumption

DOI：

英文关键词:resonant magnetic sensor double-ended quartz crystal tuning fork(DETF) magnetostrictive material high quality factor

基金项目:国家自然科学基金重大科研仪器研制专项（61527813）资助

作者	单位
黄子军	1. 南京理工大学机械工程学院
卞雷祥	1. 南京理工大学机械工程学院
李辉	1. 南京理工大学机械工程学院
彭伟民	1. 南京理工大学机械工程学院
张闯	1. 南京理工大学机械工程学院
文玉梅	2. 上海交通大学电子信息与电气工程学院
李平	2. 上海交通大学电子信息与电气工程学院

Author	Institution
Huang Zijun	1. School of Mechanical Engineering, Nanjing University of Science and Technology
Bian Leixiang	1. School of Mechanical Engineering, Nanjing University of Science and Technology
Li Hui	1. School of Mechanical Engineering, Nanjing University of Science and Technology
Peng Weimin	1. School of Mechanical Engineering, Nanjing University of Science and Technology
Zhang Chuang	1. School of Mechanical Engineering, Nanjing University of Science and Technology
Wen Yumei	2. School of Electronic Information and Electrical Engineering, Shanghai Jiaotong University
Li Ping	2. School of Electronic Information and Electrical Engineering, Shanghai Jiaotong University

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中文摘要:

针对现有谐振式磁传感器原理不能同时实现高品质因数(Q)和低功耗的缺点,利用双端固定石英音叉谐振器与铁镓磁致伸缩合金片复合,设计了一种隔离磁机阻尼的高 Q 值、数字频率输出的超低功耗谐振式磁传感器。利用音叉谐振器结构的解耦特性,设计应力耦合传递结构,隔离了磁致伸缩材料磁机阻尼,从而保证复合传感器 Q 值与音叉谐振器 Q 值相当。在磁场作用下,磁致伸缩力传递到音叉谐振器,由于音叉力敏感特性,实现磁-力-频率转换。制备了铁镓合金/ 石英音叉谐振器复合敏感结构,测试表明:在低气压封装条件下的品质因数约为 16 764,门振荡电路功耗约为 124. 8 μW,在线性区灵敏度为 3. 05 Hz/ Oe,分辨率为 6 mOe。

英文摘要:

Aiming at the shortcomings of the existing resonant magnetic sensor principle that high quality (Q) factor and low power consumption cannot be achieved at the same time, a low-power resonant magnetic sensor with high Q-factor and digital frequency output is designed by combining the double-ended quartz crystal tuning fork (DETF) resonator with magnetostrictive FeGa plate. Using the decoupling characteristic of the structure of DETF resonator, the stress coupling structure is designed to isolate the magnetomechanical damping of the magnetostrictive material. Thus, the Q-factor of the composite sensor is almost equal to that of the DETF resonator. The magnetostrictive force occurring under magnetic field induces a longitudinal force in the DETF. The magnetic-force-frequency conversion is achieved due to the force sensitive characteristic of the DETF. A low pressure packaged sensors based on the composite structure of FeGa alloy and DETF resonator is fabricated. The test results show that the Q-factor and power consumption of the sensor are about 16 764 and 124. 8 μW, respectively. In the linear region, the sensitivity and resolution are 3. 05 Hz/ Oe and 6mOe, respectively.

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